Laser Cleaving of Sapphire Wafer with Pre-Groove
نویسندگان
چکیده
منابع مشابه
An Investigation on Two Types of Crystalline Micro-diamond Film Coated Tools Lapping with Sapphire Wafer
Two types of micron-diamond films were prepared on YG6 substrate by hot filament chemical vapor deposition(HFCVD) method. Morphology and orientation of crystalline growth were evaluated by SEM and XRD. Diamond film coated tools and sapphire wafer’ surface before and after lapping experiment were contrasted. The results indicated that a significant change in Raman spectrum of two types of micro...
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ژورنال
عنوان ژورنال: TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C
سال: 2013
ISSN: 0387-5024,1884-8354
DOI: 10.1299/kikaic.79.3285